Chaw Tsim Khoom Siv Lim Purity Siab Muab Kev Tswj Xyuas Kev Nqus Dej Zoo Rau Fabs thiab Cov Ntawv Thov Chav Huv Si
Chaw Tsim Khoom Siv Lim Purity Siab Muab Kev Tswj Xyuas Kev Nqus Puv Nkaus
rau Fabs thiab Cleanroom Applications
Kev piav qhia
HENGKO Cov Lim Dej Nto Mount yog tsim los ua kom tau raws li qhov xav tau ntawm cov txheej txheem roj sib xyaw ua ke siv hauv cov cuab yeej semiconductor OEM. Muab kev lim dej ua lag luam ntawm 0.003 µm, cov lim dej no ua kom muaj kev ua tau zoo thiab kev ntseeg siab nrog kev cuam tshuam cov khoom me me ntawm ≥99.9999999% (9-LRV) ntawm 120 slpm.
Ua los ntawm cov hmoov hlau stainless 316L uas ruaj khov sintered rau lub lim thiab lub tsev, cov lim no ua raws li SEMI F86-0304 cov lus qhia, muaj ob lub qhov chaw nres nkoj uas tsim rau 1.125 "roj faib tshuab nrog C-seal configuration. Lawv txhawb nqa qhov siab tshaj plaws ntawm 3.4 MPa ntawm 100 ° C thiab qhov siab tshaj plaws ntawm kev ua haujlwm sib txawv ntawm 0.69 MPa ntawm 100 ° C.
Cov lim dej tshwj xeeb no, sib xws nrog ob qho tib si C-hom thiab W-hom foob specifications, ua tiav qhov huv si nrog cov khoom me me tso tawm ntawm
Nrog qhov chaw tiav ntawm Ra<1.6 µm ntawm sab nraud thiab Ra< 0.13 µm ntawm sab hauv, lawv tau tsim los kom tiv taus qhov kub siab txog li 460 ° C. Tsim los rau kev sib koom ua ke yooj yim thiab kev hloov kho tshiab ntawm cov qauv, cov lim dej no ua rau kev teeb tsa thiab kev saib xyuas yooj yim dua, pab txhim kho kev ua haujlwm ntawm lub kaw lus hauv kev xa roj semiconductor thiab kev tswj hwm.
Khoom Feature
▶ Kev tsim kho tag nrho yog ua los ntawm cov hlau tsis xeb 316L
▶ Tsim qauv me me, qauv me me, txuag chaw
▶ Cov yam ntxwv zoo heev ntawm kev hloov pauv roj thiab kev tshem tawm
▶ Kub siab, siab siab thiab tiv taus corrosion
▶ Lub tsev ua los ntawm cov hlau tsis xeb 316L uas tau txhuam los ntawm hluav taws xob
▶ Kev teeb tsa thiab kev saib xyuas yooj yim thiab ua haujlwm tau zoo
▶ Kev sib khi ua ke, tsis txuas nrog cov khoom nruab nrab
Daim Ntawv Teev Cov Ntaub Ntawv
| Cov Kev Ntsuas Kev Txawj | Cov nqi |
|---|---|
| Cov Khoom Siv Lim | 316L Stainless Hlau Sintered Hmoov |
| Cov Khoom Siv Vaj Tse | 316L Stainless hlau |
| Qhov Siab Tshaj Plaws Nkag Mus | 3.4 MPa @ 100°C |
| Qhov Sib Txawv Ua Haujlwm Siab Tshaj Plaws | 0.69 MPa @ 100°C |
| Kev Txheeb Xyuas Qhov Xaus Helium | 1x10⁻¹¹ cc/feeb |
| Qhov Kev Ntsuas Helium Los Ntawm Kev Xaus | 1x10⁻⁹ cc/feeb |
| Kev Kho Mob Nto | Sab Nraud Ra< 1.6 μm |
| Sab Hauv Nto Ra< 0.13 μm | |
| Kub Tshaj Plaws Ua Haujlwm | 460°C |
| Kev Ua Haujlwm Zoo ntawm Kev Cuam Tshuam Particle | ≥99.9999999% (9-LRV) @ 120 slpm (Siv MPPS los piv, txhua yam khoom me me) |
| Kev Huv Si Hauv Qab Dej | Kev Tso Tawm Me Me:< 0.03 cov khoom me me/liter (< 1 lub me me/ft³) |
| Cov khoom tawg:< 10 ppb dej noo | |
| Qhov Loj ntawm Kev Cuam Tshuam Particle | ≥0.003 μm |
| Ntau yam ntws | 0 ~ 120 feeb ib feeb |
Loj
Nov yog tus lej khoom koj tuaj yeem xaj thiab cov ntsiab lus loj:
| Qauv Khoom | Tus Nqi Nqus | Qhov siab H (hli) | Kev Pom Zoo | Qib Kev Ntxuav |
|---|---|---|---|---|
| Z01B-00637 | 10 feeb ib feeb | 51.6 | 0.003 μm | C |
| Z01B-00638 | 40 feeb ib feeb | 82.9 | 0.003 μm | C |
| Z01B-00687 | 80 slpm | 126.2 | 0.003 μm | C |
| Z01B-00688 | 120 feeb ib feeb | 167.9 | 0.003 μm | C |
Cov Ntawv Thov Ib Txwm Muaj
Siv nrog W-seal thiab C-seal, 1.125” thiab 1.5” surface mount modular gas delivery systems.
Xa koj cov lus rau peb:
