semiconductor gas lim

Vim li cas thiaj xav tau siv cov roj lim hauv cov txheej txheem tsim khoom semiconductor? 

Gas lim yog qhov tseem ceeb hauv kev tsim khoom semiconductor rau ntau qhov laj thawj tseem ceeb:

1. Kev tshem tawm cov kab mob

Semiconductor fabrication suav nrog ntau cov txheej txheem rhiab heev qhov twg txawm tias cov kab mob me tshaj plaws,

xws li cov plua plav, ya raws, lossis cov tshuaj lom neeg, tuaj yeem ua rau muaj kev puas tsuaj. Roj lim tshem tawm

cov khoom me me, impurities, thiab cov pa paug tawm los ntawm cov txheej txheem gases, ua kom ib puag ncig huv

thiab tswj kev ncaj ncees ntawm semiconductor wafers.

2. Tuav Ultra-Purity Standards

Kev lag luam semiconductor yuav tsum muaj siab heev ntawm purity nyob rau hauv cov gases siv, raws li impurities tuaj yeem

ua rau muaj teeb meem hauv cov khoom siv semiconductor. Gas lim pab ua kom tiav cov roj ntshiab ntshiab, tiv thaiv

kev sib kis thiab ua kom ntseeg tau qhov sib xws thiab kev ntseeg siab ntawm cov khoom.

3. Cov cuab yeej tiv thaiv

Cov kab mob hauv cov pa roj tuaj yeem tsis tsuas yog ua mob rau cov semiconductor wafers tab sis kuj ua rau cov rhiab heev

cov cuab yeej siv hauv kev tsim khoom, xws li tshuaj vapor deposition (CVD) reactors thiab

etching systems. Cov roj lim tiv thaiv cov tshuab kim no los ntawm kev puas tsuaj, txo kev pheej hmoo ntawm

downtime thiab nqi kho.

4. Tiv thaiv kev poob tawm

Kev tawm los yog qhov tseem ceeb hauv kev tsim khoom semiconductor, qhov uas tsis xws luag tuaj yeem ua rau poob ntau hauv kev tsim khoom.

Txawm tias ib qho me me los yog cov tshuaj tsis huv tuaj yeem ua rau cov khoom poob, cuam tshuam rau kev tsim khoom thiab cov txiaj ntsig.

Cov roj lim kom paub meej tias cov txheej txheem cov pa roj ntshiab huv, txo cov paug paug thiab txo cov khoom poob.

5. Ua kom cov khoom zoo

Kev sib raug zoo thiab kev ua tau zoo yog qhov tseem ceeb hauv kev tsim khoom semiconductor. Cov pa paug tuaj yeem tsim tau

inconsistencies, ua rau unreliable semiconductor li. Los ntawm kev siv roj lim, manufacturers tuaj yeem

lav tias txhua batch ua tau raws li cov qauv nruj nruj uas yuav tsum tau ua, ua rau cov cuab yeej siab dua

kev ua haujlwm thiab kev ua haujlwm ntev.

6. Txo downtime

Cov pa paug hauv cov txheej txheem roj tuaj yeem ua rau cov khoom siv tsis ua haujlwm, xav tau kev saib xyuas lossis hloov pauv.

Los ntawm kev siv cov roj lim, cov tuam txhab lag luam tuaj yeem txo qis kev poob qis, tswj kev ua haujlwm zoo, thiab

ncua lub neej ntawm cov khoom siv tseem ceeb.

7. Tshuaj Compatibility

Feem ntau ntawm cov roj siv hauv cov txheej txheem semiconductor yog cov reactive lossis corrosive heev. Gas lim yog

tsim los tiv thaiv cov cheeb tsam tshuaj hnyav no thaum ua kom zoo lim impurities, kom ntseeg tau

kev nyab xeeb thiab ua tau zoo.

Zuag qhia tag nrho, cov ntxaij lim dej roj yog qhov tseem ceeb rau kev tswj xyuas qhov purity, kev ntseeg siab, thiab kev nyab xeeb ntawm semiconductor.

kev tsim khoom, pab kom ua tiav cov khoom zoo, tsis muaj cov khoom siv semiconductor thaum

kuj tiv thaiv cov cuab yeej muaj txiaj ntsig.

Hom roj lim hauv cov txheej txheem tsim khoom semiconductor

Hauv cov txheej txheem tsim khoom semiconductor, ntau hom roj lim tau siv los hais txog ntau yam

theem thiab cov teeb meem cuam tshuam nrog roj purity thiab kev tiv thaiv cov khoom siv.

Hom roj lim feem ntau siv suav nrog:

1. Particulate Lim

* Lub hom phiaj: Tshem tawm cov khoom, plua plav, thiab lwm yam khoom paug tawm ntawm cov txheej txheem roj.

* Kev siv: Feem ntau ntsia ntawm ntau theem los tiv thaiv wafers, txheej txheem chav, thiab cov khoom siv los ntawm cov kab mob sib kis.

* Cov khoom siv: Feem ntau yog ua los ntawm sintered stainless hlau, PTFE, los yog lwm yam ntaub ntawv uas kom durability thiab tshuaj compatibility.

2. Molecular lossis Chemical Lim (Getter Lim)

* Lub hom phiaj: Txhawm rau tshem tawm cov kab mob molecular tshwj xeeb, xws li ya raws, oxygen, lossis cov organic tebchaw, uas tej zaum yuav muaj nyob rau hauv cov txheej txheem gases.

* Kev siv: Siv thaum muaj roj purity siab, xws li thaum lub sij hawm deposition los yog etching txheej txheem.

* Cov khoom siv: Feem ntau tsim siv hluav taws xob hluav taws xob, zeolite, lossis lwm yam khoom siv adsorbent tshwj xeeb tsim los txhawm rau cov khoom tsis huv.

3. High-Purity Gas Lim

* Lub hom phiaj: Ua kom tau raws li cov qauv roj purity ultra-high purity (UHP), uas yog ib qho tseem ceeb rau cov txheej txheem semiconductor qhov twg cov impurity me ntsis tuaj yeem cuam tshuam cov khoom zoo.

* Kev siv: Cov lim dej no yog siv rau hauv cov txheej txheem xws li Chemical Vapor Deposition (CVD) thiab Plasma Etching, qhov twg impurities tuaj yeem ua rau muaj qhov tsis xws luag.

* Cov khoom siv: Ua los ntawm stainless hlau nrog tshwj xeeb daim nyias nyias kom muaj kev ncaj ncees nyob rau hauv kev kub siab thiab huab cua.

4. Bulk Gas Lim

* Lub hom phiaj: Txhawm rau ntxuav cov pa roj ntawm qhov chaw nkag lossis ua ntej xa mus rau cov kab tsim khoom.

* Kev siv: Muab tso rau hauv cov pa xa hluav taws xob los lim cov roj hauv cov khoom ua ntej lawv muab rau cov cuab yeej los yog cov reactors.

* Cov khoom siv: Cov lim dej no feem ntau muaj peev xwm los tuav cov roj ntau ntau.

5. Point-of-Suse (POU) Gas Lim

* Lub hom phiaj: Txhawm rau kom ntseeg tau tias cov pa roj xa mus rau txhua qhov kev ua haujlwm tshwj xeeb tsis pub muaj cov kab mob sib kis.

* Kev siv: Txhim kho ua ntej cov pa roj nkag mus rau cov txheej txheem khoom siv, xws li etching lossis deposition chambers.

* Cov khoom siv: Ua los ntawm cov ntaub ntawv sib xws nrog cov roj reactive siv hauv cov txheej txheem semiconductor, xws li sintered hlau lossis PTFE.

6. Inline Gas Lim

* Lub hom phiaj: Txhawm rau muab inline pom rau cov pa roj txav mus los ntawm kev faib khoom.

* Kev siv: Nruab nyob rau hauv cov roj kab ntawm cov ntsiab lus tseem ceeb, muab kev pom tsis tu ncua thoob plaws hauv lub cev.

* Cov khoom siv: Sintered stainless hlau los yog npib tsib xee los xyuas kom meej cov tshuaj compatibility nrog cov gases.

7. Nto Mount Gas Lim

* Lub hom phiaj: Yuav tsum tau txuas ncaj qha mus rau cov khoom vaj huam sib luag roj kom tshem tawm cov kab mob thiab cov kab mob molecular.

* Kev siv: Feem ntau nyob rau hauv qhov chaw nruj, cov ntxaij lim dej no muab cov ntsiab lus siv tau zoo hauv cov ntawv thov tseem ceeb.

* Cov khoom siv: High-purity stainless hlau rau durability thiab compatibility nrog semiconductor manufacturing gases.

8. Sub-Microfilters

* Lub hom phiaj: Txhawm rau lim tawm cov khoom me me, feem ntau me me li sub-micron qhov ntau thiab tsawg, uas tseem tuaj yeem ua rau muaj qhov tsis xws luag hauv cov txheej txheem semiconductor.

* Kev siv: Siv nyob rau hauv cov txheej txheem uas yuav tsum tau muaj qib siab tshaj plaws ntawm kev pom kom tswj tau cov roj ntshiab huv, xws li photolithography.

* Cov khoom siv: High-density sintered hlau lossis ceramic cov ntaub ntawv uas tuaj yeem cuam tshuam txawm tias qhov me tshaj plaws.

9. Activated Carbon Lim

* Lub hom phiaj: Txhawm rau tshem tawm cov kab mob organic thiab cov pa tsis haum.

* Kev siv: Siv nyob rau hauv daim ntawv thov uas gaseous impurities yuav tsum tau muab tshem tawm los tiv thaiv wafer paug los yog cov tshuaj tiv thaiv cuam tshuam.

* Cov khoom siv: Activated carbon cov ntaub ntawv tsim los adsorb organic molecules.

10.Sintered Hlau Gas Lim

* Lub hom phiaj: Txhawm rau tshem tawm cov khoom seem thiab cov impurities zoo thaum muab cov qauv tsim muaj zog thiab ua haujlwm siab.

* Kev siv: Siv dav hauv ntau theem ntawm cov txheej txheem semiconductor uas yuav tsum muaj kev lim dej zoo.

* Cov khoom siv: Feem ntau yog ua los ntawm sintered stainless hlau los yog lwm yam hlau alloys kom tiv taus ib puag ncig hnyav thiab tshuaj.

11.Hydrophobic Gas Lim

* Lub hom phiaj: Txhawm rau tiv thaiv kom tsis txhob ya raws lossis dej vapor nkag mus rau hauv cov dej ntws, uas yog qhov tseem ceeb hauv qee cov txheej txheem uas nkag siab txog cov kab dej noo.

* Kev siv: Feem ntau siv rau hauv cov txheej txheem xws li wafer ziab lossis plasma etching.

* Cov khoom siv: Hydrophobic membranes, xws li PTFE, los xyuas kom meej tias cov pa roj nyob twj ywm tsis muaj dej paug.

Cov ntau hom roj lim no tau ua tib zoo xaiv raws li lawv cov khoom tshwj xeeb, cov khoom siv sib xws, thiab tsim nyog rau cov xwm txheej tshwj xeeb ntawm cov txheej txheem tsim khoom semiconductor. Kev sib xyaw ua ke ntawm cov ntxaij lim dej yog qhov tseem ceeb rau kev tswj hwm qib siab tshaj plaws ntawm cov pa purity, ua kom cov txheej txheem ruaj khov, thiab tiv thaiv qhov tsis xws ntawm cov khoom siv semiconductor.

Qee cov FAQ txog semiconductor roj lim

FAQ 1:

Dab tsi yog semiconductor gas lim thiab vim li cas lawv tseem ceeb?

Semiconductor roj lim yog cov khoom tseem ceeb hauv cov txheej txheem tsim khoom semiconductor.

Lawv yog tsim los tshem tawm impurities thiab cov kab mob ntawm cov txheej txheem gases, xws lioxygen,

nitrogen, hydrogen, thiab ntau yam chemical gases.

Cov impurities no tuaj yeem cuam tshuam qhov zoo, tawm los, thiab kev ntseeg siab ntawm cov khoom siv semiconductor.

Los ntawm kev lim dej kom zoo, cov lim dej semiconductor pab tau:

1.Tau siab purity:

Xyuas kom meej tias cov pa roj uas siv hauv cov txheej txheem tsim khoom tsis pub muaj cov kab mob uas tuaj yeem ua rau cov cuab yeej ua haujlwm tsis zoo.

2. Tiv thaiv cov khoom puas tsuaj:

Tiv thaiv cov khoom siv semiconductor rhiab heev los ntawm particle thiab tshuaj lom neeg, uas tuaj yeem ua rau raug nqi qis thiab kho dua tshiab.

3. Txhim kho cov khoom tawm los:

Txo qhov tsis xws luag thiab ua tsis tiav los ntawm cov pa roj impurities, uas ua rau cov khoom lag luam ntau dua.

4. Txhim kho cov cuab yeej kev ntseeg siab:

Txo qhov kev puas tsuaj mus sij hawm ntev ntawm cov khoom siv semiconductor vim muaj teeb meem cuam tshuam txog kev sib kis.

FAQ 2:

Dab tsi yog hom semiconductor gas lim?

Ob peb hom roj lim tau siv hauv kev tsim khoom semiconductor, txhua tus tsim los tshem tawm

hom kab mob tshwj xeeb.

Feem ntau hom muaj xws li:

1.Particulate filters:

Cov lim dej no tshem tawm cov khoom siv, xws li plua plav, fibers, thiab hlau hais, los ntawm cov dej ntws.

Lawv feem ntau yog ua los ntawm cov ntaub ntawv xws li sintered hlau, ceramic, los yog membrane lim.

2.Chemical filters:

Cov lim dej no tshem tawm cov tshuaj tsis huv, xws li dej vapor, hydrocarbons, thiab corrosive gases.

Lawv feem ntau ua raws li cov txheej txheem adsorption los yog nqus, siv cov ntaub ntawv xws li cov pa roj carbon activated,

molecular sieves, los yog tshuaj sorbents.

3.Combination lim:

Cov ntxaij lim dej no muab cov peev txheej ntawm cov khoom siv thiab cov tshuaj lim dej kom tshem tawm ob hom

cov kab mob. Lawv feem ntau siv rau hauv cov ntawv thov tseem ceeb uas qhov kev ua siab dawb huv yog qhov tseem ceeb.

FAQ 3:

Semiconductor gas lim xaiv thiab tsim li cas?

Kev xaiv thiab tsim cov roj lim semiconductor muaj ntau yam, suav nrog:

* Gas ​​purity xav tau:

Qhov xav tau qib ntawm purity rau cov roj kwj tshwj xeeb txiav txim siab qhov kev pom zoo thiab muaj peev xwm.

* Flow tus nqi thiab siab:

Lub ntim ntawm cov pa yuav tsum tau lim thiab cov kev khiav hauj lwm siab cuam tshuam lub lim qhov loj, cov khoom, thiab configuration.

* Hom kab mob thiab concentration:

Cov hom kab mob tshwj xeeb muaj nyob hauv cov kwj dej dictate qhov kev xaiv ntawm lim xov xwm thiab nws qhov pore loj.

* Kub thiab av noo:

Cov kev ua haujlwm tuaj yeem cuam tshuam rau lub lim dej ua haujlwm thiab kev ua neej nyob.

* Nqi thiab kho:

Tus nqi pib ntawm cov lim dej thiab nws cov kev tu ncua tsis tu ncua yuav tsum tau txiav txim siab.

Los ntawm kev ua tib zoo xav txog cov xwm txheej no, engineers tuaj yeem xaiv thiab tsim cov lim roj uas ua tau raws li qhov tshwj xeeb

kev xav tau ntawm cov txheej txheem tsim khoom semiconductor.

Yuav Ua Li Cas Hloov Cov Roj Lim Hauv Semiconductor Manufacturing?

Qhov hloov zaus ntawm cov lim roj hauv cov khoom siv semiconductor nyob ntawm ntau yam, suav nrog hom

txheej txheem, theem ntawm cov kab mob, thiab hom kev lim dej siv. Feem ntau, cov ntxaij lim dej roj tau hloov ua ntu zus

lub sij hawm txij nkawm kom tsis txhob muaj kev pheej hmoo ntawm kev kis kab mob,feem ntau txhua 6 mus rau 12 lub hlis, nyob ntawm kev siv cov xwm txheej

thiab cov lus pom zoo los ntawm cov chaw tsim khoom lim.

Txawm li cas los xij, cov sijhawm hloov pauv tuaj yeem sib txawv raws li qhov chaw ua haujlwm. Piv txwv li:

* Cov txheej txheem muaj kab mob siab:

Cov ntxaij lim dej yuav tsum tau hloov ntau zaus yog tias lawv raug rau cov qib siab

Particle los yog molecular contamination.

* Cov ntawv thov tseem ceeb:

Hauv cov txheej txheem uas xav tau siab purity (xws li, photolithography), cov ntxaij lim dej feem ntau hloov

preemptively los xyuas kom meej tias cov roj zoo tsis raug cuam tshuam.

Kev saib xyuas qhov sib txawv ntawm lub lim dej yog ib txoj hauv kev los txiav txim siab thaum lub lim yuav tsum tau hloov.

Raws li cov kab mob sib sau ua ke, lub siab poob thoob plaws lub lim dej nce ntxiv, qhia txog kev txo qis hauv kev ua haujlwm.

Nws yog ib qho tseem ceeb los hloov cov ntxaij lim dej ua ntej lawv cov kev ua haujlwm poob qis, vim tias kev ua txhaum cai ntawm cov pa purity tuaj yeem ua rau muaj qhov tsis xws luag,

txo cov qoob loo, thiab tseem ua rau cov khoom puas tsuaj.

Dab tsi yog cov khoom siv roj lim ua los ntawm kev siv semiconductor?

Cov roj lim siv hauv cov ntawv siv semiconductor yog tsim los ntawm cov ntaub ntawv uas tuaj yeem tswj tau cov qauv purity siab tshaj plaws

thiab tiv taus qhov hnyav ib puag ncig pom hauv kev tsim khoom. Cov ntaub ntawv uas muaj xws li:

* Stainless hlau (316L): Cov khoom siv dav siv ntau tshaj plaws vim nws cov tshuaj tiv thaiv, kev siv lub zog, thiab

muaj peev xwm yuav fabricated nrog leej pore qhov ntau thiab tsawg siv sintering tshuab. Nws yog tsim rau lim ob qho tib si reactive

thiab inert gases.

* PTFE (Polytetrafluoroethylene): PTFE yog cov khoom siv tsis muaj tshuaj lom neeg siv rau kev lim dej ntau heev lossis corrosive

cov pa. Nws muaj cov tshuaj zoo sib xws thiab cov khoom siv hydrophobic, ua rau nws zoo tagnrho rau cov dej noo-rhiab heev

txheej txheem.

* Nickel thiab Hastelloy:

Cov ntaub ntawv no yog siv rau cov kev siv kub kub lossis rau cov txheej txheem cuam tshuam nrog cov tshuaj phem

qhov twg stainless hlau yuav degrade.

* Ceramic:

Cov ntxaij lim dej ceramic yog siv rau cov ntawv thov uas yuav tsum muaj qhov kub thiab txias, lossis rau sub-micron

lim cov khoom.

Qhov kev xaiv ntawm cov khoom nyob ntawm seb hom roj, muaj cov kab mob reactive, qhov kub thiab txias, thiab

lwm yam txheej txheem tsis. Cov ntaub ntawv yuav tsum yog non-reactive los xyuas kom meej tias lawv tsis qhia tej impurities

los yog hais mus rau hauv tus txheej txheem, yog li tswj cov roj purity theem uas yuav tsum tau rau semiconductor fabrication.

Lub luag haujlwm ntawm Point-of-Siv (POU) Lim hauv Semiconductor Manufacturing yog dab tsi?

Point-of-Suse (POU) cov ntxaij lim dej yog qhov tseem ceeb hauv kev tsim khoom semiconductor, vim tias lawv ua kom cov pa roj tau lim tam sim ua ntej

nkag mus rau cov txheej txheem cov cuab yeej. Cov lim dej no muab kev tiv thaiv zaum kawg tiv thaiv cov kab mob uas tuaj yeem nkag mus rau hauv cov pa roj

thaum lub sij hawm cia, tsheb thauj mus los, los yog kev faib tawm, yog li txhim kho cov txheej txheem stability thiab cov khoom zoo.

Cov txiaj ntsig tseem ceeb ntawm POU Lim:

* Muab tso rau ze rau cov cuab yeej tseem ceeb (xws li, etching lossis deposition chambers) kom tsis txhob muaj kab mob kis mus txog qhov wafer.

* Tshem tawm ob qho tib si me me thiab molecular impurities uas tuaj yeem qhia los ntawm kev siv roj los yog ib puag ncig raug.

* Ua kom ntseeg tau tias cov roj tau zoo tshaj plaws yog xa mus rau cov txheej txheem cov cuab yeej, tiv thaiv cov cuab yeej thiab txhim kho cov khoom tsim tau zoo.

* Txo cov txheej txheem variability, nce yield, thiab txo qhov tsis xws luag.

* Indispensable nyob rau hauv advanced semiconductor ib puag ncig uas txawm me me impurities tuaj yeem cuam tshuam kev tsim khoom thiab kev ntseeg tau ntawm cov khoom.

Yuav ua li cas cov roj lim tiv thaiv cov khoom siv downtime hauv cov txheej txheem semiconductor?

Gas lim tiv thaiv cov khoom siv downtime hauv cov txheej txheem semiconductor los ntawm kev ua kom cov txheej txheem gases tsis tu ncua

cov kab mob uas tuaj yeem ua rau muaj kev puas tsuaj rau cov khoom tsim khoom. Semiconductor fabrication muaj feem xyuam rau kev siv heev

Cov khoom siv rhiab heev, suav nrog cov khoom tso tawm, cov tshuab plasma etching, thiab cov tshuab photolithography.

Yog tias cov khoom paug xws li plua plav, noo noo, lossis cov khoom tsis huv nkag mus rau hauv cov tshuab no, lawv tuaj yeem ua rau muaj teeb meem ntau,

los ntawm clogging li qub thiab nozzles rau puas wafer nto los yog reactor interiors.

Los ntawm kev siv cov roj lim dej zoo, cov tuam txhab lag luam tiv thaiv kev qhia txog cov kab mob no, txo qhov yuav tshwm sim.

kev tu thiab kho cov khoom siv tsis tau npaj tseg. Qhov no pab tswj cov sijhawm tsim khoom ruaj khov, txo qis

kim downtime, thiab zam cov nuj nqis tseem ceeb cuam tshuam nrog kev kho lossis hloov.

Tsis tas li ntawd, cov ntxaij lim dej uas muaj kev ruaj ntseg zoo pab kom ntev lub neej ntawm cov khoom tseem ceeb, xws li cov tswj ntws, li qub, thiab cov reactors,

li no txhim kho tag nrho cov efficiency thiab profitability ntawm manufacturing txheej txheem.

Yog li tom qab tshawb xyuas qee cov ntsiab lus ntawm cov lim dej semiconductor, yog tias tseem koj muaj qee cov lus nug ntxiv.

Npaj los ua kom zoo dua koj cov txheej txheem tsim khoom semiconductor nrog cov roj pom zoo?

Hu rau HENGKO hnub no rau cov kws tshaj lij kev taw qhia thiab kev daws teeb meem kom tau raws li koj xav tau.

Tom qab kuaj xyuas qee cov lus qhia txog cov roj lim semiconductor, yog tias koj tau txais lus nug ntxiv?

Npaj los ua kom zoo dua koj cov txheej txheem tsim khoom semiconductor nrog cov roj pom zoo?

Hu rau HENGKO hnub no rau cov kws tshaj lij kev taw qhia thiab kev daws teeb meem kom tau raws li koj xav tau.

Email rau peb ntawmka@hengko.comyog xav paub ntxiv.

Peb pab neeg no nyob ntawm no los pab koj txhim kho koj cov kev tsim khoom thiab cov khoom zoo.