Sintered In-line Hlau Gas Lim rau Semiconductor Gas Purification System

Sintered hauv-kab hlau roj lim ua haujlwm kom tshem tawm cov impurities xws li ya raws, oxygen, carbon dioxide, carbon monoxide, hydrocarbons thiab hlau carbonyls los ntawm kev siv lub txaj reactive ntawm cov khoom.Cov impurities raug tshem tawm los ntawm cov dej ntws hauv cov cheeb tsam uas ib txwm muaj kev lim dej tsis zoo.Peb cov ntaub ntawv muab cov ntaub ntawv keeb kwm yav dhau los tshem tawm cov kab mob tsis muaj hlau los yog lwm yam kab mob phem rau cov txheej txheem ntws.

All-hlau high-flow filters txaus siab rau cov kev txhawj xeeb thiab xav tau kom muab cov khoom tsis muaj cov txheej txheem roj rau ntawm qhov chaw xa khoom.Inline hlau gas lim yog ibsintered stainless hlau hlau limnrog lub tsev stainless hlau.Peb nqa cov khoom los ntawm sintered lim media (sintered stainless hlau lim) tag nrho txoj kev mus rau qhov kawg khoom, ib tug roj lim siv nyob rau hauv zus tau tej cov khoom xws li semiconductors, vaj huam sib luag tiaj tus, thiab hnub ci vaj huam sib luag.

Muaj nrogsintered hlau limfiltration rau tag nrho cov txheej txheem gases.Los nyob rau hauv ntau yam haum hom kom tau raws li peb cov neeg muas zaub 'installation yuav tsum.Muaj nrog 0.1 µm filtration technology kom tau raws li qhov xav tau tshaj plaws ntawm ultra-ntshiab bulk gas xa.

Daim ntawv thov:
Inert gases
Noble gases
Nonreactive gases
Hydrid gases
Perfluorocarbon thiab corrosive gases.